| 摘要 |
PURPOSE:To correct effect of eddy current on the periphery of a deflection coil to erase by applying current changing index functionally to beam scan current when beam scanning is made through an exciting current to the deflection coil to obtain scanning image. CONSTITUTION:A penetration electronic microscope scans over a sample 4 secondarily by a deflection magnetic field forming coils 1X, 1Y under the condition where electron rays Z are focused by a focusing lens 3 and forms scanning image. This time, a deflection coil drive circuit is formed so as to drive a deflection coil L by adding output of a saw-tooth shape wave generating circuit 11 generating saw-tooth wave and an index function generating circuit 12 using a folded point function generator by a adding machine 13, and effect due to eddy current generated on a conductive member present on the periphery of the deflection coil can be corrected to erase. Therefore, correct scanning image with less strain can be obtained to enabled high speed scanning. |
