| 摘要 |
PURPOSE:To enable a pallet to improve its positioning accuracy when a workpiece is replaced, by fixing the pallet onto a table through a static pressure pneumatic bearing formed between the table of a machine tool and the pallet. CONSTITUTION:A guide 8, embedding a several rows of compressed air jetting nozzles 9 at an equal internal vertically and laterally in each side, supplies compressed air to the nozzle 9 via a supply port 10. While a device, providing a clearance (a) of several 10mum mutually between the guide 8 and a pallet 3 and supplying compressed air to the nozzle 9 immediately before the pallet 3 is inserted to the guide 8 so as to carry the pallet 3 in the main unit side via a roller guide 6, fixes the pallet 3 onto a table 7 through a static pressure pneumatic bearing. Accordingly, the pallet 3, at a point of time it is inserted to the guide 8, is fixed in a vertical and a lateral direction by rigidity of the static pressure pneumatic bearing itself formed between the pallet and the guide 8 without particularly providing a clamp, while the pallet 3 obtains high repeated positioning accuracy from an averaged effect provided in the static pressure pneumatic bearing even if a dust or the like infiltrates into the clearance (a). |
