| 摘要 |
PURPOSE:To bake large screens without complicating and scaling up the titled device, by transcribing patterns are projected to the different regions of an exposed substrate by switching the light path with an optical axis shift means. CONSTITUTION:The patterns on a mask surface 1 illuminated by the illuminating light 6 are transcribed on a baked substrate 2 with an optical system 3. At this time, they are transcribed on the left half of the substrate 2 via reflection mirror 4. Baking is performed to the remaining half of the substrate 2 by changing the light path through the movement of the reflection mirror 4. |
