| 摘要 |
PURPOSE:To provide a gate device for emergency shut-off which spends about 10ms or less during a time between generation of an instruction signal and completion of shut-off, b a method wherein the device is constituted such that a gate valve is driven by an electromagnetic device, and a high current is fed to the electromagnetic device. CONSTITUTION:A gate valve device 4 for emergency shut-off is located in the middle of a pressure 1 of a high vacuum device. A shut-off plate 3 is actuated by a electromagnetic device 6. The electromagnetic device 6 comprises a solenoid 8 and an armature 7, and the shut-off plate 3 is coupled to the armature 7. The solenoid 8 is decreased in the number of coil windings so as to feed a high current. Meanwhile, an excitation control circuit 9, controlling the electromagnetic device 6, has a capacitor accumulating a high current. When an emergency instruction signal is outputted, a high current is fed from the circuit 9 to the electromagnet device 6. |
