| 摘要 |
PURPOSE:To improve feed accuracy of a device using a guide in common, by quickly feeding a table by the movement of a cylinder tube with a piston being stopped and slowly feeding the table by a feed screw with a cylinder and the piston being fixed by compressed air. CONSTITUTION:If a rotary member 25 is rotated by a rotary actuator 23, a cylinder tube 7 and a table 5 fixed to the tube 7 are quickly fed. And if compressed air is supplied to a supply air port 15, the cylinder tube 7 and the table 5 are further quickly fed and positioned in a place where a piston 9 is adapted to a rod cover 13, here a shock absorber 27 relaxes a shock between the rod cover 13 and the piston 9. Next the piston 9 and the rod cover 13 are pressed in a fixed condition by compressed air, and then if a feed screw shaft 20 is rotated by driving a motor 21, a piston rod 10 performs a linear movement slowly feeding the table 5. In this way, a compact device in good feed accuracy is obtained by enabling a guide to be used in common. |
