发明名称 MANUFACTURE OF INFRARED DETECTING ELEMENT
摘要 PURPOSE:To improve yield on manufacture by enhancing a step coverage at the stepped section of an adhesive layer. CONSTITUTION:An HgCdTe crystal 22 is bonded onto an insulating substrate 21 by using adhesives 23, and the crystal 22 is abraded, and HgCdTe crystals 12 are shaped to regions 25 and 26 in which a photosensitive section and electrode connecting sections are formed. One parts of adhesives 23 are exposed at that time. The whole HgCdTe crystals 12 are etched, end sections 27 are made gentle, and a process through which first and second conductors are shaped is executed. A laminate consisting of Cr or Ti and Au or Al, In or the like is fitted as a conductor material 29, and these elements are laminated through a film formation method having an excellent step coverage, such as bias sputtering, oblique evaporation, etc.
申请公布号 JPS6164173(A) 申请公布日期 1986.04.02
申请号 JP19840186831 申请日期 1984.09.06
申请人 NEC CORP 发明人 YAMAGATA TOSHIO
分类号 G01J1/02;H01L31/0224;H01L31/0264;H01L31/18 主分类号 G01J1/02
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