发明名称 |
HEAT TREATMENT DEVICE BY LINEAR ELECTRON BEAM |
摘要 |
PURPOSE:To fix length of a linear section of an electron beam and to uniformalize distribution of the beam current density by providing a the part slit having a linear section of an electron beam with a slit such as to cut both ends of said linear section in the path of an electron beam. CONSTITUTION:An electron beam 7 forming a linear section part 6 (crossover) with a control electrode 3, which has a rectangular beam path hole 2 surrounding a coil emitter 1, and a positive pole 5 provided with a similarly rectangular beam path hole 4 is focused by the first electron lens for forming an image of the crossover in the position of a slot 9. Both end parts the linear section part 10 forming the crossover image are cut by the slit 9 for being projected on a work 12 by the second lens 11. |
申请公布号 |
JPS6164058(A) |
申请公布日期 |
1986.04.02 |
申请号 |
JP19840185915 |
申请日期 |
1984.09.05 |
申请人 |
NEC CORP |
发明人 |
NAKAMURA TSUYOSHI;KAWASE YUTAKA;SAITO SHUICHI |
分类号 |
H01J37/09;C21D1/09;H01J37/30;H01L21/06;H01L21/263 |
主分类号 |
H01J37/09 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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