Process and apparatus for producing a gas of high purity by vaporization of a cryogenic liquid

摘要

The reservoir 1 contains in its lower part a purifying vessel 2 which contains a plate 9 having a bell means communicating with the reservoir and provided with an overflow pipe 12 through which liquid overflows into a bath having a constant level. When gas is drawn off from the top of the purifying vessel, liquid taken from the lower bath is vaporized in an exterior vaporizer 3 and the gas produced passes through the two baths in succession. In this way it is possible to obtain the gases having high purity devoid of particles of dust which are required for certain applications and in particular in the electronic component industry.