| 摘要 |
PURPOSE:To produce composite fine powder consisting of silicon nitride and silicon carbide, by reacting a specific alkoxysilane compound in a gaseous phase to give fine powder and heat-treating the fine powder in a nonoxidizing atmosphere. CONSTITUTION:An alkoxysilane compound shown by the formula is used as a raw material. In the formula, R is chlorine, bromine, iodine, hydrogen, alkyl group, allyl group, or phenyl group; n is 0, 1, 2, or 3). For example, tetramethoxysilane, tetraethoxysilane, methyltrimethoxysilane, etc. may be cited as the alkoxysilane compound. The alkoxysilane is reacted in a gaseous phase to give fine powder, which is heat-treated in a nonoxidizing atmosphere, to produce composite fine powder consisting of silicon nitride and silicon carbide. |
