| 摘要 |
<p>PURPOSE:To fill a container with high-purity monosilane gas by retaining monosilane under reflux in a storing tank for a liquid monosilane, and then filling the container with the monosilane from the storing tank. CONSTITUTION:Monosilane is formed by reducing chlorosilane group by a reducing agent and reacting alloys such as Mg2Si and the like upon hydrochloric acid or ammonium chloride, and is accompanied by refined hydrogen. The monosilane is condensated and stored in a storing tank. In the storing tank, after the monosilane is retained under reflux, preferably, in the state of boiling to the vicinity of boiling point temperature of the monosilane, the monosilane is drawn out by a pump from the lower portion of the storing tank, and heated by a vaporizer to be filled in a container. The monosilane may be drawn out from the vapor phase portion of the storing tank retained under reflux by a compressor to be filled in the container.</p> |
