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发明名称
FEED SCREW SYSTEM
摘要
申请公布号
JPS6162657(A)
申请公布日期
1986.03.31
申请号
JP19840182563
申请日期
1984.09.03
申请人
CANON INC
发明人
TAKAHASHI KAZUO
分类号
H01L21/68;F16H25/20;H01L21/67
主分类号
H01L21/68
代理机构
代理人
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