| 摘要 |
<p>PURPOSE:To safely conduct a work by disposing three or more layers of packings on a pressure-up rotary device for filling a container layer packing side space and inert gas in an outer layer packing side space. CONSTITUTION:Liquid monosilane in a product holder 2 is filled from a line 3 through a line 5 and carburetor 6 in a container 7 by a pressure-up rotary device 4. Three or more layers of packings 9, 10, 11 are inserted in the ground seal portion 8 of the device 4, thereby to form plural space portions 12, 13. Hydrogen gas is poured in the inner layer space portion 12 from a line 14, and inert gas such as nitrogen gas and the like is poured in the outer layer space portion 13. In this arrangement, monosilane which leaks from the device will be accompanied by hydrogen gas to be collected, and further diluted to be discharged to the outside of a system to avoid the danger or ignition.</p> |
