| 摘要 |
PURPOSE:To obtain a small and light probe, by forming a matching device and a piezo-electric thin film integral on a lens employing material requiring a polarization processing for a high piezo-electric activity in a dielectric. CONSTITUTION:An lower electrode 11 (made of Au, Cr, Pt or the like) is provided on a lens material 20 while a ceramic material 10 is formed thereon by sputtering or other methods and two upper electrodes are provided thereon. Hence, the ceramic material 10 is sandwitched by two upper and lower electrodes pairs, namely, between the electrode 102 and the lower electrode 11 on one hand and between the electrode 101 and the lower electrode 11 on the other. When an RF power is applied to a sandwitch structure of the upper electrode 101 and the lower electrode, an ultrasonic wave is emitted to a lens port 30. On the other hand, the ceramic sandwitched between the upper electrode 102 and the lower electrode 11 is high in the dielectric constant but inactive in the piezo-electric position and so, even with the application of an RF power at both ends of the part, no ultrasonic generates. Thus, this section can be operated as matching part by selecting the shape of the electrode 102. |
