发明名称 CLEAN TUNNEL
摘要 PURPOSE:To prevent powder dust from invading into the transportation tunnel by a method wherein the tunnel is spearated into the transportation tunnel and a running and driving tunnel. CONSTITUTION:Separators 20 composed of a pair of intermediate separators 20a and the side separators 20s are oppositely faced to each other to the inner surfaces of the side walls 12s of the main body 12 in such a way as they form a central air passage 19c for passing a supporting cylinder 18S for the transportation self-running bogie 18 and a pair of side air passages 19s, and the separators are mounted on a plurality of supporting plates 21 properly spaced apart thereto, the transportation tunnel 22 is separated into the transported object tunnel 22h and the running and driving part 22r, so that even if the powder dust or eddy currenct is generated, a degree of clean condition in the transported object tunnel 22h may not be affected at all but be kept high, so that it is possible to transport the object W to be carried without covering to the automatic processing device.
申请公布号 JPS6162739(A) 申请公布日期 1986.03.31
申请号 JP19840182734 申请日期 1984.09.03
申请人 SANKI ENG CO LTD 发明人 TANAKA HIROKUNI
分类号 F24F7/06;B61B13/10;B61C13/00;H01L21/677 主分类号 F24F7/06
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