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发明名称
THIN FILM WORKING DEVICE BY ELECTRIC DISCHARGE
摘要
申请公布号
JPS6160890(A)
申请公布日期
1986.03.28
申请号
JP19840184036
申请日期
1984.09.03
申请人
MATSUSHITA ELECTRIC IND CO LTD
发明人
ISHIHARA SHINICHIRO
分类号
C23F4/00;C23F1/08
主分类号
C23F4/00
代理机构
代理人
主权项
地址
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