| 摘要 |
PURPOSE:To improve the processing efficiency by providing a control lenses freely movably on the optical path of laser beam against a processing convergent lenses and maintaining a focal length of the processing convergent lenses always constant. CONSTITUTION:A control lenses 7 is provided between a laser beam generator 1 and a processing convergent lenses 3 and is constituted freely movably by a supporting and moving mechanism 9 on the optical path of laser beam 2. A processing convergent lenses 3 is located by the program previously scheduled and a material 4 to be worked is processed by the laser beam 2. At this time, the position of the control lenses 7 is detected by a detector 12, and a control part 15 calculates the proper position and the focal length of the lenses 3 is positioned to be constant. By this method, a beam diameter to be made incident on the lenses 3 is maintained constant even if the position of the lenses 3 is changed to control the diameter of the lenses 3 and improve the processing efficiency. |
