| 摘要 |
PURPOSE:To obtain a member having uniform physical property and quality, by introducing a raw material comprising two or more compounds represented by a specified formula and an oxygen atom-introducing raw substance into an accumulation chamber, and forming a photoconductive member on a support by discharge. CONSTITUTION:Gaseous raw material is introduced into a decompressed accumulation chamber, and discharge is generated in the gaseous atmosphere to form a phnotoconductive layer on a support. Thus, a photoconductive member is produced. The raw material comprises compounds represented by the general formula of SinH2n+2 and an oxygen atom-introducing substance. As the compounds represented by the general formula, 1vol% or more, preferably 10vol%, of a higher-n compound, e.g. Si3H8 or Si4H10, is mixed with the lowest-n compound, e.g. Hi2H6. The rate of the oxygen atom-introducing raw substance, e.g. disiloxane, is about 8vol% or less by the compounds represented by the general formula. Atmospheric gas to be used is He, Ne or the like, for instance, the temperature of the support is controlled at about 150 deg.C or higher, and discharge power is controlled at about 100W or more. |
