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发明名称
TEST APPARATUS FOR SEMICONDUCTOR
摘要
申请公布号
JPS6159849(A)
申请公布日期
1986.03.27
申请号
JP19840180662
申请日期
1984.08.31
申请人
NIPPON TELEGR & TELEPH CORP <NTT>
发明人
YANO TAKAO;HORIGUCHI KATSUJI;OKAMOTO HIDETAKA
分类号
H01L21/66;G01R1/073
主分类号
H01L21/66
代理机构
代理人
主权项
地址
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