| 发明名称 |
DETERMINATION OF TRUE ELECTRICAL CHANNEL LENGTH OF SURFACE FET |
| 摘要 |
The true electrical channel length of a surface FET is determined by obtaining individual electron-beam-induced-current signal traces of source and drain junctions, thus eliminating the coupling effect of the two junctions. A reliable mask is formed as a function of the measured peak-to-peak distance subtracted by the depletion width. |
| 申请公布号 |
DE3362113(D1) |
申请公布日期 |
1986.03.27 |
| 申请号 |
DE19833362113 |
申请日期 |
1983.04.13 |
| 申请人 |
INTERNATIONAL BUSINESS MACHINES CORPORATION |
发明人 |
SCHICK, JEROME DAVID |
| 分类号 |
H01J37/28;G01R31/26;G01R31/265;G01R31/302;H01L21/66;H01L21/822;H01L27/04;H01L29/78;(IPC1-7):G01R31/26 |
主分类号 |
H01J37/28 |
| 代理机构 |
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代理人 |
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| 主权项 |
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| 地址 |
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