| 摘要 |
PURPOSE:To increase the step feed speed with a small amount of drive power and to stop an X-Y stage accurately at a desired position, by reducing the weight of a mobile part and then the inertia and the driving power of the X-Y stage. CONSTITUTION:A table 1 is supported by a Y-axis direction support member 4 so that is can be slid along an X-axis direction guide 2. The member 4 is supported by a Y-axis direction bearing 8 via a Y-axis direction shaft 6. The same constitution is secured also in the Y-axis direction. Furthermore the drive is possible in both X and Y direction with the same driving power. An X-axis direction support member 5 or an X-axis direction shaft 7 is pushed to shift the table 1 in the X-axis direction with an X-Y stage which is used for positioning of a semiconductor water. Then the member 4 is guided by an X-axis direction guide 2, and the same operation is carried out in the orthogonal direction for the shift in the Y-axis direction. It is required for the table 1 to have its size large enough just to hold the semiconductor wafer. The size of a head 10 or the distance between both bearings 8 and 9 is decided by a mobile range of the table 1. |
