发明名称 POSITIONING METHOD
摘要 PURPOSE:To reduce the minimum travel angle into about one tenth by including a wedge shape member between a piezoelectric element and an arm tip end, reducing an expansion and contraction movement of the piezoelectric element and moving a positioning body according to a reducing movement. CONSTITUTION:A wedge shape material 9 has a slope 10 with an inclination tanalpha=1/10, held between a piezoelectric element 7 and a spring 11 and moves in a longitudinal direction on a board 12 according to an expansion of the element 7. Though a minimum feeding size for the tip end 4 is about 0.1mum when the element 7 directly presses up the tip end 4, it is reduced into 1/10 by the member 9 and becomes about 0.01mum.
申请公布号 JPS6159730(A) 申请公布日期 1986.03.27
申请号 JP19840181075 申请日期 1984.08.30
申请人 FUJITSU LTD 发明人 SUGISHIMA KENJI;MIYAZAWA HITOSHI
分类号 H01L21/30;G03F9/00;H01L21/027 主分类号 H01L21/30
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