发明名称 |
GLOW DISCHARGE METHOD OF APPLYING A CARBON COATING |
摘要 |
Disclosed is a method of forming a hard, carbonaceous film on a substrate and the hard carbonaceous film formed thereby. The hard carbonaceous film is formed by decomposing a gaseous hydrocarbon having carbon atoms tetrahedrally coordinated to carbon nearest neighbors through carbon-carbon single bonds. The gaseous hydrocarbon is decomposed in a radio frequency maintained plasma and the plasma decomposition products are deposited on a cathodic substrate. Optionally, fluorocarbons may be present in a decomposition gas. |
申请公布号 |
AU4707685(A) |
申请公布日期 |
1986.03.27 |
申请号 |
AU19850047076 |
申请日期 |
1985.09.04 |
申请人 |
ENERGY CONVERSION DEVICES, INC. |
发明人 |
STANFORD R. OVSHINSKY;JAMES FLASCK |
分类号 |
C23C16/26;C23C16/27;C23C16/32;C23C16/50;C23C16/511;H01L21/205;H01L21/314 |
主分类号 |
C23C16/26 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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