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发明名称
VAPOR GROWING METHOD OF MULTIELEMENT MIXED CRYSTAL III-V GROUP COMPOUND SEMICONDUCTOR
摘要
申请公布号
JPS6158899(A)
申请公布日期
1986.03.26
申请号
JP19840182114
申请日期
1984.08.31
申请人
NEC CORP
发明人
MAKITA KIKUO
分类号
C30B25/02;C30B25/14;C30B29/40;H01L21/205
主分类号
C30B25/02
代理机构
代理人
主权项
地址
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