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发明名称
VERFAHREN ZUR HERSTELLUNG VON HOMOGENEN HALBLEITERKOERPERN AUS SILICIUMLEGIERUNGEN
摘要
申请公布号
DE1769979(B2)
申请公布日期
1972.10.26
申请号
DE19681769979
申请日期
1968.08.16
申请人
发明人
分类号
C23C4/12;C30B11/10;C30B15/08;H01L35/34
主分类号
C23C4/12
代理机构
代理人
主权项
地址
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