ANTIREFLEXIONSSCHICHTSYSTEME MIT ABSORBIERENDEN KOMPONENTEN FUER DIE FOTOLITHOGRAFISCHE STRUKTURUEBERTRAGUNG,申请号DD19850272856-传众专利搜索

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发明名称	ANTIREFLEXIONSSCHICHTSYSTEME MIT ABSORBIERENDEN KOMPONENTEN FUER DIE FOTOLITHOGRAFISCHE STRUKTURUEBERTRAGUNG
摘要
申请公布号	DD234316(A1)	申请公布日期	1986.03.26
申请号	DD19850272856	申请日期	1985.01.30
申请人	TH ILMENAU,,,,DD	发明人	WAGNER,ROLAND,DD
分类号	H01L21/312;(IPC1-7):H01L21/312	主分类号	H01L21/312
代理机构		代理人
主权项
地址

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