发明名称 Workpiece heater
摘要 A workpiece heater suitable for use in heating electronic micro circuitry while minimizing work displacement as an incident to expansion and contraction of the structural components of the heater employs a rotatable work table and a heater disposed to heat the table by radiation. The table is mounted on a shaft supported against axial movement by a tapered bearing. The bearing is pre-loaded by a spring arranged to urge the shaft against the bearing. That structural arrangement is combined with the use of elongated elements and reflecting shields to minimize heat transfer to the mechanism by which the worktable shaft is rotated.
申请公布号 US4578032(A) 申请公布日期 1986.03.25
申请号 US19840674790 申请日期 1984.11.26
申请人 MILLER, C. FREDRICK 发明人 MILLER, C. FREDRICK
分类号 H01L21/00;(IPC1-7):F24J3/00;F27D23/00;F27D11/00;F27B9/06 主分类号 H01L21/00
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