| 摘要 |
PURPOSE:To contrive improvement in accuracy of positioning by a method wherein a fixed frequency and the oscillatory movement of amplitude are superposed on the scanning of a charged beam, and the above-mentioned frequency component only is picked out from the detected signals of the generated electron. CONSTITUTION:When a focussed ion beam is made to irradiate on the detected mark to be used for positioning which is provided on a material 7, the generated secondary electron or an Auger electron is detected using detecting devices 110-114. When said ion beam is scanned, a deflecting electrode 106 is controlled in such a manner that the vibratory movement of the charged beam of a fixed frequency, which has the speed higher than that of scanning and having sufficiently shorter amplitude than the width of the detected mark to be used for positioning, is superposed on the scanning of ion beam. The obtained detection signal is introduced to a phase discrimination detector 112, a phase discriminating inspection is performed by the frequency sent to the electrode 106 from an ion beam controller 111, and the result is introduced to an indicating system 114. According to this method, the accuracy of positioning can be improved especially in the case where a deposition layer is present on the detection mark to be used for positioning. |
