Piezoelectric precise rotation mechanism for slightly rotating an object

摘要

In a precise rotation mechanism for slightly rotating an object, a drive disk is placed on a flat and smooth surface of a base and rotating disk is mounted on the disk surface of the drive disk and rotatably supported by a pivot bearing on a coupling section of the drive disk. Fixed sections of the drive disk are fixed on the base and movable sections of the drive disk are tiltably coupled to the fixed sections through the coupling section by elastic hinges and also coupled to the fixed sections by driving members made of piezoelectric elements, which are elongated/contracted upon application of a voltage to slightly move the movable sections. Fixing members made of the piezoelectric elements are respectively fixed to the movable sections. When one of the fixing members is contracted, the rotating disk is urged by one of the fixing members against the movable sections and is movable together with the movable sections.