发明名称 Device for process-type deposition of polycrystalline silicon on carbon film
摘要 A crucible containing molten silicon, has a strip of carbon film vertically transported through the melt, an optical system imaging a small area of the silicon surface onto a photodetector, said image area being that of the silicon liquid-solid interface, and a servo system connected to said photodetector and to an electrical drive for feeding silicon into said melt. The invention is applicable to the manufacture of solar cells.
申请公布号 US4577588(A) 申请公布日期 1986.03.25
申请号 US19840644910 申请日期 1984.08.28
申请人 COMPAGNIE GENERALE D'ELECTRICITE;SOCIETE NATIONALE ELF AQUITAINE 发明人 MAUTREF, MICHEL;BELOUET, CHRISTIAN
分类号 B05C3/12;C30B15/00;H01L31/0368;H01L31/18;(IPC1-7):B05C3/132 主分类号 B05C3/12
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