发明名称 |
Device for process-type deposition of polycrystalline silicon on carbon film |
摘要 |
A crucible containing molten silicon, has a strip of carbon film vertically transported through the melt, an optical system imaging a small area of the silicon surface onto a photodetector, said image area being that of the silicon liquid-solid interface, and a servo system connected to said photodetector and to an electrical drive for feeding silicon into said melt. The invention is applicable to the manufacture of solar cells.
|
申请公布号 |
US4577588(A) |
申请公布日期 |
1986.03.25 |
申请号 |
US19840644910 |
申请日期 |
1984.08.28 |
申请人 |
COMPAGNIE GENERALE D'ELECTRICITE;SOCIETE NATIONALE ELF AQUITAINE |
发明人 |
MAUTREF, MICHEL;BELOUET, CHRISTIAN |
分类号 |
B05C3/12;C30B15/00;H01L31/0368;H01L31/18;(IPC1-7):B05C3/132 |
主分类号 |
B05C3/12 |
代理机构 |
|
代理人 |
|
主权项 |
|
地址 |
|