| 摘要 |
PURPOSE:To facilitate the operation of analytical data by providing a storage means that stores the quantum signals coming from a sample as picture data and making the holding formal of one-dimensional waveforms obtained by a scanning type electron microscope equal to that of two-dimensional pictures. CONSTITUTION:In picture mode, electron rays 22 are converged on a sample 25 and the sample is surface-scanned two-dimentionally by a deflection means 31. Generated quantum signals are deflected by a deflection means 27 and stored in picture memory 47 and then is displayed on a display unit 50. In addition, in waveform monitoring mode that uses a stroboscope, beams 35 are blanked by a deflection plate 33 and one-dimensional picture signals are detected and stored in parallel to the picture memory 47 as the repeating picture data. The beams are integrated by a picture data processing means including a clock generation circuit 46 and a synchronous control device 45 and averaged, and then displayed in a one-dimensional picture. As a result, by adding simple structure, an analytical data processing unit that can perform the quantitative waveform measurements and waveform display can be obtained. |
