| 摘要 |
PURPOSE:To perform high-speed efficient inspection by stopping subsequent inspection if a defect is detected during defect inspection, and entering the inspection of a next object body. CONSTITUTION:One object 3 of inspection is lighted vertically 6 and slantingly above 7, and an image of the object body 3 is picked up every time lighting 6 or 7 is performed to inspect different kinds of defects from obtained image pickup information. If it is decided during the surface defect inspection that there is a defect, the subsequent inspection of the object body 3 is stopped and a next object body begins to be inspected. |
