| 摘要 |
PURPOSE:To prevent the propagation of bacteria on the way of filtering, by providing a heater for heating deionized water flowed into a filter to temp. preventing the propagation of bacteria between an ion exchange apparatus and a filter apparatus. CONSTITUTION:In a high purity water making apparatus for filtering deionized water supplied from an ion exchange apparatus 10 by a filter 38 using an ultrafiltration membrane 38C, a heater 32 is provided to the main piping 14 between the ion exchange apparatus 10 and the filter 38 to heat deionized water flowed into the filter 38 to temp. preventing the propagation of bacteria, that is, 80 deg.C prescribed by the Japanese pharmacopoeia. As a result, bacteria mixed in deionized water in a slight amount are prevented from propagation during filtering and the purity of high purity water after manufacturing can be enhanced. |
