| 摘要 |
<p>A gripper mechanism having at least two vacuum grippers which are horizontally displaceable and fixable along a cross strut of the gripper mechanism. The gripper mechanism is vertically movable up and down and includes a blow pipe which extends over the width of the cross strut and from which an air stream is expelled. The air stream presses the photoresist-free reverse side of the photoresist film to be held and transported against the vacuum grippers. As soon as the vacuum grippers are subjected to a vacuum, the photoresist film is held and transported downwardly. On the upper side of the blow pipe are arranged stop screws which come into contact upon elevation of the gripper mechanism with the underside of vertically displaceable fastening elements, to which a cutting bar with a cutting groove is fastened. Upon elevation of the gripper mechanism, the cutting bar is taken up with it, the photoresist film being raised by the taper of the cutting bar from the suction plate which is under a vacuum.</p> |
