Infrared detector, night vision device making use thereof and method for manufacturing same

摘要

This infrared detector comprises a network of hornshaped antenna elements 12 formed in a single crystal silicon body 11 and bolometer elements 14, one for each horn, detecting the radiation received by the horn. These antenna elements are obtained by masking and selective chemical attack of the silicon of the wafer 11. A network of conductors 16 allows individual addressing of the bolometer elements. Such a device is useful in particular in night vision devices and heat detectors. <IMAGE>