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发明名称
摘要
申请公布号
DE2632093(C2)
申请公布日期
1986.03.20
申请号
DE19762632093
申请日期
1976.07.16
申请人
INTERNATIONAL BUSINESS MACHINES CORP., ARMONK, N.Y., US
发明人
ALCORN, GEORGE EDWARD, SILVER SPRING, MD., US;FEELEY, JAMES DOWNER, MARSHALL, VA., US
分类号
H01L21/306;H01L21/302;H01L21/3065;H01L21/311;H01L21/768;(IPC1-7):H01L21/302
主分类号
H01L21/306
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