| 摘要 |
PURPOSE:To attain high accuracy positioning with wide range by constituting a unit positioning means with a floating body, a stator supporting it with a magnetic force and a floating body position adjusting means adjusting the position of the floating body so as to avoid the lowering of a load capacity from being incurred. CONSTITUTION:The single and simultaneous progressing of a floating body 4 in the X and Z axes and the turning movement in the beta direction are attained with the combination of the magnetic forces of magnets 26a,b-31a,b between an intermediate floating body 3 and the floating body 4. Since the position control is set with ultraminute gap among the magnets 26a-31b and magnetic plates 6a,b-11a,b, the bodies are supported magnetically stably even under high magnetic rigidity. On the other hand, the quantity of the magnetomotive force of the magnets 52a,b-57a,b is combined between the stator 2 and the intermediate floating body 3, the single and parallel movement of the intermediate floating body 3 toward the Y and Z directions and the turning movement toward the direction beta are attained and the body is supported stably even under a high magnetic rigidity. Thus, as a whole, the moving control of the floating body 4 in the X, Y,Z axes and the moving control of the alpha and beta are attained under a high magnetic rigidity. |
