| 摘要 |
PURPOSE:To realize the rapid heating and low saturation temperature by a method wherein a ceramic heater and a sheathed heater having a structure as a control means of an energizing electric power are engaged together and arranged in a holder. CONSTITUTION:A ceramic heater 12 is held at the top end of a holder 13, and the first resistance body 11 as a heating body is embedded in the ceramic heater 12. A sheathed heater 21 having the second resistance body 20 for electric power control which is connected in series to the one end of the first resistance body 11 is arranged in continuing manner for a ceramic heater 12 via a conductor 18. The sheathed heater 21 is formed so that the second resistance body 20 is embedded in a heat resistance insulating powder 23 filled in a sheath 22 made of metal in sealed manner. Then the sheathed heater 21 is engaged and held in the holder 13 under the condition that a heat resistance insulating tube 24 is engaged at the outer periphery of the sheath 22. Thereby, the rapid heating and low saturation temperature can be realized. |
