| 摘要 |
PURPOSE:To improve the performance of a 2-axes positioning device by supporting fixedly one end of a guiding stator of a Y axis linear motor with a rotor of an X-axis linear motor and moving the other end toward the Y axis by the motor of the other X axis linear motor. CONSTITUTION:The 2-axes positioning is attained with the 1st axis X, the 2nd axis Y, the guiding stator 1s of the X axis linear motor, the guiding stator 3s of the Y axis linear motor, the rotor 1M of the X axis linear motor. A projection 4 is provided to the rotor 1M of the X axis linear motor and fitted to a slot provided to one end of the guiding stator 3s of the Y axis linear motor. Thus, the rotor 1M of the X axis linear motor supports the guiding stator 3s of the Y axis linear motor. Through the mechanism above, the guiding stator 3s of the Y axis linear motor is slid toward the Y direction to the rotor 1M of the X axis linear motor. |
