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发明名称
DYNAMIC SEMICONDUCTOR MEMORY AND MANUFACTURING METHOD THEREOF
摘要
申请公布号
EP0102696(A3)
申请公布日期
1986.03.19
申请号
EP19830303603
申请日期
1983.06.22
申请人
KABUSHIKI KAISHA TOSHIBA
发明人
SHIBATA, TADASHI
分类号
H01L21/8242;H01L27/02;H01L27/108;(IPC1-7):H01L27/10;G11C11/24
主分类号
H01L21/8242
代理机构
代理人
主权项
地址
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