| 摘要 |
PURPOSE:To prevent the disturbance of a magnetic field by using nonmagnetic fine ceramics in a table device that feeds and drives the sample stage for an electron microscope for a location in which abrasion occurs following the feed operarion. CONSTITUTION:A table device 1 that feeds and drives samples for low acceleration scanning type electron microscopes is comprised by providing with a Y-direction move stage 6 and an X-direction move stage 8 through linear bearings 5 and 7 and then Y- and X-direction feed mechanisms 9 and 10 containing a motor 15, ball screw 12, and nut 14. In this cases, the ball screw 11, nut 14, bearing 11, linear bearings 5 and 7, etc. of the feed mechanisms 9 and 10 are made of silicate nitrdie that is the fine ceramics with good resistance to abrasion and other sections are made of nonmagnetic stainless steel. As a result, a picture can be stabilized without the disturbance of a magnetic field and the handling of the table device can be improved through nonlubrication. |
