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经营范围
发明名称
IMPURITY REMOVING APPARATUS
摘要
申请公布号
JPS6154217(A)
申请公布日期
1986.03.18
申请号
JP19840173605
申请日期
1984.08.21
申请人
SONY CORP;KYORITSU SEISAKUSHO:KK
发明人
GOMI TAKAYUKI;SHIBADATE MASASHIGE;KASHIWANUMA AKIO;WATABE HIROSHI
分类号
B01D39/14;H01L21/304
主分类号
B01D39/14
代理机构
代理人
主权项
地址
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