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发明名称
HEAT TREATING DEVICE
摘要
申请公布号
JPS6154184(A)
申请公布日期
1986.03.18
申请号
JP19840173415
申请日期
1984.08.22
申请人
CHINO WORKS LTD;HITACHI LTD
发明人
HISHIKARI ISAO;KOBARI TETSUO;AMADA HARUO
分类号
G01J5/00;H01L21/205;H01L21/22;H01L21/31;H01L21/66;H05B7/18
主分类号
G01J5/00
代理机构
代理人
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地址
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