| 摘要 |
PURPOSE:To absorb incident beams as much as possible, and to utilize them for photoelectric conersion by introducing a film consisting of MnO between a transparent conductive film and a semiconductor thin-film. CONSTITUTION:A transparent conductive film 2 s formed onto a glass substrate 1, and MnO is evaporated onto the surface of the substrate by electron beams to obtain an evaporated film 6 in not more than 100Angstrom thickness. An a-Si film 3 is shaped to the substrate. A back electrode 4 is formed onto the film 3. In a solar cel formed in this manner, the greater part of incident beam 5 from the direction of the arrow are transmitted in the same direction as the arrow, and pass in the film 2 and are projected in the direction of the arrow. The greater part reach the interface between the film 3 and the film 6 even on the interface between the film 2 and the film 6. Scattering is increased with the roughening of morphology of the inserting film at that time, and an optical path in the film 3 is lengthened and light energy absorbed in one layer is augmented, thus improving the characteristics of the solar cell. When the thickness of the film 6 exceeds 100Angstrom , however, series resistance components are increased, and characteristics are deteriorated. |
