Apparatus for preheating mold resin for a semiconductor device

摘要

Preheating apparatus for use in a semiconductor molding apparatus for preheating mold resin before the mold resin is charged in a mold comprises a microwave generator generating a microwave, a waveguide connected to the microwave generator, and a positioning device for positioning the mold resin in such a manner that the center of the mold resin coincides with the position of a peak of the distribution of the electric field intensity due to the microwave.