发明名称 Etching optical surfaces on GaAs
摘要 Photoelectrochemical etching of gallium arsenide in highly alkaline aqueous solution yields optically smooth etched surfaces suitable for many optical devices. Higher optical quality is obtained for lower irradiation energy provided sufficient energy is available to produce holes in the valence band.
申请公布号 US4576691(A) 申请公布日期 1986.03.18
申请号 US19840636177 申请日期 1984.07.31
申请人 AT&T BELL LABORATORIES 发明人 KOHL, PAUL A.;SMITH, LAWRENCE E.;TROP, HARVEY S.
分类号 C25F3/12;C25F3/14;H01L21/3063;(IPC1-7):C25F3/12 主分类号 C25F3/12
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