发明名称 Apparatus for applying a coating on a substrate
摘要 Apparatus for applying a coating, particularly for coating and advancing a substrate within a longitudinal passage having a plurality of transversely arrayed gaseous medium supply channels and a plurality of vacuum discharge channels intersecting the passage. A plurality of transversely arrayed coating medium supply channels intersect a processing side of the passage adjacent the vacuum discharge channels. Also, a restriction gap is defined in the passage intermediate the coating material supply channels and the vacuum discharge channels so as to insure filling of a first coating passage with coating material.
申请公布号 US4576109(A) 申请公布日期 1986.03.18
申请号 US19850736739 申请日期 1985.05.22
申请人 BOK, EDWARD 发明人 BOK, EDWARD
分类号 B05C5/02;H01L21/677;(IPC1-7):C23C14/00;C23C16/00 主分类号 B05C5/02
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