发明名称 Method of making heteroepitaxial ridge overgrown laser
摘要 A method of making a ridge waveguide laser with the ridge being grown through a stripe opened in an oxide layer covering one of the cladding layers is described. In one embodiment, the cladding layer is corrugated and the ridge waveguide laser is a distributed feedback laser.
申请公布号 US4575919(A) 申请公布日期 1986.03.18
申请号 US19840613468 申请日期 1984.05.24
申请人 AT&T BELL LABORATORIES 发明人 LOGAN, RALPH A.;TSANG, WON-TIEN
分类号 H01L21/208;H01S3/063;H01S5/00;H01S5/12;H01S5/22;H01S5/223;H01S5/327;(IPC1-7):G02B6/10;H01S3/19;H01L29/205 主分类号 H01L21/208
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