发明名称 |
Method of making heteroepitaxial ridge overgrown laser |
摘要 |
A method of making a ridge waveguide laser with the ridge being grown through a stripe opened in an oxide layer covering one of the cladding layers is described. In one embodiment, the cladding layer is corrugated and the ridge waveguide laser is a distributed feedback laser.
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申请公布号 |
US4575919(A) |
申请公布日期 |
1986.03.18 |
申请号 |
US19840613468 |
申请日期 |
1984.05.24 |
申请人 |
AT&T BELL LABORATORIES |
发明人 |
LOGAN, RALPH A.;TSANG, WON-TIEN |
分类号 |
H01L21/208;H01S3/063;H01S5/00;H01S5/12;H01S5/22;H01S5/223;H01S5/327;(IPC1-7):G02B6/10;H01S3/19;H01L29/205 |
主分类号 |
H01L21/208 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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