| 摘要 |
PURPOSE:To obtain a titled device high in rotation accuracy and also can be manufactured easily by supporting axially a load of a diameter direction by one dynamic pressure gas journal bearing part. CONSTITUTION:When power is fed to a rotation driving part 4, a rotating body part 2 floated by a magnetic thrust bearing part 3 rotates at a high speed of tens of thousands times or more per minute. Following this rotation, a dynamic pressure is induced in a dynamic pressure generating groove 28..., and as for the rotating body part 2, a load of the radial direction is supported with no-contact in a bush 26 part. In this case, it is supported axially by one dynamic pressure gas journal bearing part 5, therefore, since the desired working accuracy and assembling accuracy can be obtained easily, the dynamic balance of the rotating body part 2 is improved, and the generation of various causes for deteriorating the rotation accuracy such as a whirling rotation, an uneven rotation, etc. can be inhibited as much as possible. |
