| 摘要 |
PURPOSE:To prevent contamination of pure water due to breakdown of bellows by providing an intermediate chamber having a respiration hole surrounded by double stage bellows between the operating section and the contacting section with liquid flowing through the valve section. CONSTITUTION:The bellows provided between the operating section and the contacting section with liquid flowing through the valve section is constituted with first and second stage bellows 15a, 15b to produce an intermediate chamber surrounded by said bellows while a respiration hole 16 is provided. Upon breakdown of bellows 15a, said chamber A is filled with pure water which is ejected through the respiration hole 16 to the outside. Here, the pure water is prevented from reaching to upper functioning section by means of the bellows 15b. |
