| 摘要 |
PURPOSE:To adjust the angle of a head easily, and to strengthen a device forcibly by forming a bimorph, in which is piezoelectric element and a metallic plate are laminated, supporting one end of the bimorph by a support section and shaping a first electrode on the support section side and second and third electrodes to a nose section. CONSTITUTION:A bimorph 1 is shaped by laminating a piezoelectric element 1a and a metallic plate 1b, a first electrode 2 is formed on the support section side of the outer side surface of the piezoelectric element 1a, a second electrode 3 is shaped similarly to the nose section of the piezoelectric element 1a, a third electrode 4 is formed to the nose section in the same manner, and the electrodes 2-4 and extending sections 3a, 4a are shaped to the outer side surface of the piezoelectric element 1a. An intermediate electrode 5 is shaped onto the whole surface of the laminating surface of the piezoelectric element 1a. The arrow represents the direction of polarization of the piezoelectric element 1a. Regarding operation, the piezoelectric element 1a is extended when the same potential as the direction of polarization is applied, and it is shrunk in reverse case. Consequently, the element 1a is operated in the warping direction toward the nose section from a susceptor 6 by voltage V1, and operated in the twisting direction by voltage V2. Accordingly, the direction of deflection and the direction of wappage can be selected freely by the polarity and voltage value of voltage V1, V2. |
